| Name |
SHIKIDA, Mitsuhiro |
| Title and Academic Degree |
Associate Professor, Doctor of Engineering |
| Research Group |
Division of Environmental Research |
| Subject of Research |
Studies on Micro-Electro-Mechanical Systems (MEMS) |
| Related School and Department |
School of engineering, Dept. of Micro-Nano System Eng. |
| Laboratory HP |
http://www.kaz.mech.nagoya-u.ac.jp/ |
| Contact |
Phone ( 5031 ) FAX ( 5032 ) E-Mail ( shikida@*esi.nagoya-u.ac.jp )
Please delete * , when you send an e-mail. |
| Last Academic Career |
1990, M.S. degree at Seikei University |
| Career |
- 1990, Central Res. Lab., Hitachi Ltd.
- 1992, Mechanical Engineering Res. Lab., Hitachi, Ltd.
- 1995, Dept. of Micro System Eng., Nagoya University
- 1998, Dr. Eng. (Nagoya University)
- 2001, Research Center for Advanced Waste and Emission Management, Nagoya University
- 2004, EcoTopia Science Institute, Nagoya University
|
| Membership of Academic Society |
- Institute of Electrical Engineers of Japan
- The Japan Society of Mechanical Engineers
|
| Research Field |
Micro-Electro-Mechanical Systems (MEMS) |
| Awarded Prizes |
- Ando Incentive Prize for Study of Electronics, 1998
- Presentation Paper Award from Institute of Electrical Engineers of Japan, 1999
- The Japan Society of Mechanical Engineers, Tokai Entrepreneur Award, 1999
- Inoue Research Award for Young Scientist, 2000
|
| Teaching Classes |
Physics 1, Electrical circuits engineering, Advanced on Micro-nano Process |
| Outline of Research |
My research field is MEMS technologies. I especially focused on fabrication process for MEMS devices and it applications. I now develop active tactile sensor and Micro-Total Analysis Systems. |
| Publications |
- M. Shikida, et al., "Using Wettability and Interfacial Tension to Handle Droplets of Magnetic Beads in a Micro-Chemical-Analysis System", Sensors & Actuators: B113, 1, pp.563-569, (2006).
- X. Li, et al., "Measurement for fracture toughness of single crystal silicon film with tensile test", Sensors & Actuators: A119, pp. 229-235, (2005).
- J-S. Han, et al., "Thermal characterization of micro heater arrays on a polyimide film substrate for fingerprint sensing applications", Journal of Micromechnics and Microengineering, vol. 15, pp. 282-289, (2005).
- M. Shikida, et al., " Non-Photolithographic Pattern Transfer for Fabricating Arrayed 3-D Microstructures by Chemical Anisotropic Etching " , Sensors & Actuators: A116, pp. 264-271, (2004).
- Y. Hasegawa, et al., "A micromachined active tactile sensor for hardness detection", Sensors & Actuators: A114, pp. 141-146, (2004).
- H. Tanaka, et al., "Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution", Sensors & Actuators: A114, pp. 516-520, (2004).
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| Social Activities |
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